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Micromachines

  • Multiple Gear Speed Reduction Unit

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Multiple Gear Speed Reduction Unit

    Microelectromechanical systems or MEMS are micro versions of electrical gears, motors, switches, etc. that are used to significantly reduce the size of many of today's and future devices from all kinds of industries. Common uses include defense/munitions applications, computer hard drives, optics, and many others. The image above shows the top view of gear reduction unit. Click to enlarge.

  • Alignment Clip

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Alignment Clip

    This alignment clip is used in conjunction with a transmission (please note that there are 2 layers of gears). This complex device is entirely batch-fabricated, with no assembly required. Simply amazing! Click to enlarge.

  • Micromachined Dynamometer

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Micromachined Dynamometer

    This micromachined dynamometer is used to determine the coefficient of friction by measuring the normal and tangential forces. Click to enlarge.

  • Dynamometer Beam

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Dynamometer Beam

    The beam shown exerts a normal force on the smooth “gear” of the microengine. Click to enlarge.

  • An Incredible Close-up of the Indexing Gear

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    An Incredible Close-up of the Indexing Gear

    In this view we can see the index gear is slightly inserted into the well. Click to enlarge.

  • Linear Rack Close-up

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Linear Rack Close-up

    Close-up of linear rack, rack guides, drive gear, and drive linkage. Click to enlarge.

  • Rack Height

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Rack Height

    This view was captured at an angle to show the relative height of the device over the plane of the wafer. Click to enlarge.

  • Close-up of Drive Gear Hub

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Close-up of Drive Gear Hub

    A pin joint connects the drive arm to a rotating gear. Click to enlarge.

  • Grain of Pollen and Red Blood Cells

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Grain of Pollen and Red Blood Cells

    Drive gear chain and linkages, with a grain of pollen (top right) and coagulated red blood cells (lower right, top left) to demonstrate scale. Click to enlarge.

  • Hinged Polysilicon Mirror and Drive Motors

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Hinged Polysilicon Mirror and Drive Motors

    Polysilicon layers fabricated to "fold" on hinges as motors drive linear racks, thereby tilting the flat mirror structure out of plane. Click to enlarge.

  • Bug on Device

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Bug on Device

    The image above shows a Spider mite with legs on a mirror drive assembly. Click to enlarge.

  • Optical Shutter Device

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Optical Shutter Device

    In this image are the comb drive motors, linkage mechanisms, and the large optical shutter. Because of the guide rails, the shutter can be rotated at very high speeds. Click to enlarge.

  • Triple-Piston Microsteam Engine

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Triple-Piston Microsteam Engine

    Water inside of three compression cylinders is heated by electric current and vaporizes, pushing the piston out. Capillary forces then retract the piston once current is removed. Click to enlarge.

  • The Torsional Ratcheting Actuator (TRA)

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    The Torsional Ratcheting Actuator (TRA)

    The TRA uses a rotationally vibrating (oscillating) inner frame to ratchet its surrounding ring gear. Charging and discharging the inner interdigitated comb fingers causes this vibration. Click to enlarge.

  • Angle View of the Torsional Ratcheting Actuator (TRA)

    Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov

    Angle View of the Torsional Ratcheting Actuator (TRA)

    Visible in this image: the outer ring gear along with (front to back): a pointer that indicates the degrees of oscillation of the inner frame, the electrical interconnect that supplies power to the engine, and a clip that holds the ring in place. Click to enlarge.

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